The principle goal of the NANOHEAT project is to develop, deliver and validate a miniaturized and integrated platform which provides a multidimensional nanoprobing capability for advanced thermal analysis at the nanoscale. The multi-functional system of independently controlled AFM-based nanoprobes, equipped with dedicated (focussed ion beam (FIB) functionalized) tips and actuators
will allow for multi-domain diagnostics of nanoelectronic, nanophotonic and bio-electronic devices. The proposed system will allow to observe thermal, electrical (e.g. potential) or even chemical (e.g. electrochemical) properties at the nanoscale. It will also have in-line (on wafer) diagnostics capabilities.
The consortium is composed of 3 R&D institutes, 4 university teams and 2 SMEs providing a mixture of a complementary expertise related to micro-engineering, design and technology of micro/nano-devices and systems, design and manufacturing of measurement and control electronics, modelling and simulation, material science and physics. Besides, four partners has an expertise and potential required for validation of the developed system for specific applications. The Coordinator, ITE
is a leading Polish research centre active in the micro/nanoelectronic, micro/nano-system and photonic domains.